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Wafer and panel handling, transport and storage

Wafer and panel processing

In FABs, a wafer undergoes hundreds of different processes to create the precise microstructure that has been previously designed. These processes include oxidation, lithography, deposition, CMP, and more.

To ensure the safe handling of these extremely valuable wafers or panels during loading and unloading within the different processes, a reliable robot arm with a high level of cleanliness is necessary.

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