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Semiconductor

Enhance performance in semiconductor manufacturing with Stäubli Cleanroom robot solutions

The electronics and semiconductor industries have high requirements for precision, speed, and low particle emissions. To meet these needs, Stäubli offers a line of Cleanroom robotic arms specifically designed for highly sensitive applications. Our robots are capable of handling silicon wafers, wafer carriers, photomasks, and panels throughout the entire semiconductor production process with exceptional accuracy, high speed, and smooth movements.

Robotic Requirements for the Semiconductor Industry

Cleanliness with extreme low particle generation

Compatible to cleanroom class ISO2 and ISO4 avoiding any potential damage by thin particles from the robot.

Speed, precision and smooth trajectory

Safe handling of sensitive products while maintaining high output and consistent quality.

Long-term reliability

Maintains peak performance for years. Lower maintenance frequency required.

Low footprint

Compact design suitable for small spaces.

Our dedicated products

Member of SEMI

CONTACT

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