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Cleanroom industrial robot range

Stäubli Cleanroom robots meet ISO 14644-1 class 2 (SCR version) and class 4 (CR version) standards and feature a totally enclosed arm with a glossy polyurethane surface, capable of high dexterity. Compared to other wafer robots, the Stäubli SCR and CR robots offer greater flexibility, higher payload capacity, and extended reach, perfectly meeting the challenges of wafer/photomask/carrier/cassette handling. A compact arm footprint also helps to save precious space in dedicated machines.

Easy to clean

Smooth finishing

No retention area

Hexagonal flat cap screw with sealing* 

For the best cleanliness level

Specific painting and assembly procedures 

Minimal particle emission (ISO class 2/4 conformity)

Special cleanroom lip seals

Contact our specialists or get more technical information

Main cleanroom applications

Technical specifications

6 axis robots
Model

TX2-60 / 60L

TX2-90 / 90L / 90XL

TX2-140

TX2-160 / 160L

Degrees of freedom6666
Load capacity (kg)4.5 / 3.7
14 / 12 / 74040 / 25
Reach at wrist (mm)670 / 920

1000 / 1200 / 1450

1510

1710 / 2010

Repeatability (mm)±0.02

±0.02

±0.015

±0.02/±0.03

Cleanroom standard ISO 14644-1Class 2 (SCR version) - Class 4 (CR version)Class 4 (CR version)

Protection class

(*wrist)

IP65

(*IP67)

Attachment methods360° mounting possibilityFloor or ceiling
Stäubli controllerCS9CS9 MP